Effect of Geometric Configurations of Inner Holes in Spin Coater Suction Cups on Substrate Adsorption-induced Deformation
REN Chunhua, YAN Yutong, JI Hongwei, ZHOU Zhishun, WANG Na
Journal of Netshape Forming Engineering . 2026, (8): 265 -271 .  DOI: 10.3969/j.issn.1674-6457.2026.08.024

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