Effect of Geometric Configurations of Inner Holes in Spin Coater Suction Cups on Substrate Adsorption-induced Deformation

REN Chunhua; YAN Yutong; JI Hongwei; ZHOU Zhishun; WANG Na

doi:10.3969/j.issn.1674-6457.2026.08.024

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Journal of Netshape Forming Engineering ›› 2026, Vol. 18 ›› Issue (8) : 265-271. DOI: 10.3969/j.issn.1674-6457.2026.08.024

Advanced Manufacturing Technology and Equipment

Effect of Geometric Configurations of Inner Holes in Spin Coater Suction Cups on Substrate Adsorption-induced Deformation

REN Chunhua^1,*, YAN Yutong¹, JI Hongwei¹, ZHOU Zhishun¹, WANG Na²

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Abstract

The work aims to investigate the effect of different geometric configurations of suction cup inner holes on substrate adsorption-induced deformation, thereby providing a theoretical basis for improving the forming accuracy of spin-coated films, optimizing the structural design of suction cups, and enhancing substrate adsorption stability. Three types of suction cups with the same inner-hole area, namely circular, square, and triangular configurations, were designed. Firstly, simulation calculations were performed using ANSYS Workbench software to simulate the in-plane deformation and out-of-plane displacement of the flexible substrate under different suction cup configurations. Subsequently, experimental investigations were carried out according to the three-dimensional Digital Image Correlation method (3D-DIC) to measure the strain and displacement field distributions of the flexible substrate during the adsorption process. The simulation results were consistent with the experimental results. After adsorption, larger strains of the substrate were mainly located at the edge regions and exhibited local non-uniform distribution characteristics similar to the morphology of the inner holes. The maximum first principal strain measured experimentally was close to 0.35. In terms of out-of-plane displacement, the values of the circular and square samples were close, whereas the out-of-plane displacement of the triangular sample was significantly lower, differing from that of the circular configuration by 7.9%. Different inner-hole geometric configurations have distinct effects on the substrate deformation behavior, among which the triangular configuration has the smallest influence on substrate adsorption-induced deformation. Therefore, designing suction cups with angular configurations can effectively improve the forming quality of spin-coated films.

Key words

spin coating suction cups / adsorption deformation / three-dimensional digital image correlation / strain / out-of-plane displacement

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REN Chunhua, YAN Yutong, JI Hongwei, ZHOU Zhishun, WANG Na. Effect of Geometric Configurations of Inner Holes in Spin Coater Suction Cups on Substrate Adsorption-induced Deformation[J]. Journal of Netshape Forming Engineering. 2026, 18(8): 265-271 https://doi.org/10.3969/j.issn.1674-6457.2026.08.024

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Funding

The National Natural Science Foundation of China (12102302); Natural Science Foundation of Tianjin (24JCZDJC00280); Tianjin Undergraduate Innovation Training Program (202510069062)