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中文
Numerical Simulation and Process of Back-side Ultrafast Pulse Laser Grooving for SiC Wafers
HUANG Xiaolong, HU Xirui, FAN Xiaokang, ZHANG Chen
Journal of Netshape Forming Engineering . 2026, (
7
): 238 -248 . DOI: 10.3969/j.issn.1674-6457.2026.07.022
