目的 研究不同吸盘内孔几何构型对基底吸附变形的影响,为提升旋涂薄膜的成形精度、优化吸盘结构设计及提高基底吸附稳定性提供理论依据。方法 分别设计了相同孔径面积的圆形、正方形、三角形3种吸盘,首先利用ANSYS Workbench软件进行仿真计算,模拟不同吸盘构型下柔性基底的平面变形和离面位移;再通过三维数字图像相关方法（3D-DIC）开展实验研究,测量柔性基底在吸附过程中的应变与位移场分布。结果 模拟仿真结果与实验结果一致。吸附后基底较大应变均位于内孔边缘处,并具有与内孔形貌相似的局部非均匀分布特征,实验测得的平面第一主应变最大值接近0.35;在离面位移方面,圆形与正方形试样数值接近,而三角形的离面位移明显较低,较圆形构型相差达7.9%。结论 不同内孔几何构型对基底变形规律的影响具有差异性,其中三角形对基底吸附变形的影响较小。因此,设计具有边角构型的吸盘可有效提高旋涂薄膜的成形质量。
Abstract
The work aims to investigate the effect of different geometric configurations of suction cup inner holes on substrate adsorption-induced deformation, thereby providing a theoretical basis for improving the forming accuracy of spin-coated films, optimizing the structural design of suction cups, and enhancing substrate adsorption stability. Three types of suction cups with the same inner-hole area, namely circular, square, and triangular configurations, were designed. Firstly, simulation calculations were performed using ANSYS Workbench software to simulate the in-plane deformation and out-of-plane displacement of the flexible substrate under different suction cup configurations. Subsequently, experimental investigations were carried out according to the three-dimensional Digital Image Correlation method (3D-DIC) to measure the strain and displacement field distributions of the flexible substrate during the adsorption process. The simulation results were consistent with the experimental results. After adsorption, larger strains of the substrate were mainly located at the edge regions and exhibited local non-uniform distribution characteristics similar to the morphology of the inner holes. The maximum first principal strain measured experimentally was close to 0.35. In terms of out-of-plane displacement, the values of the circular and square samples were close, whereas the out-of-plane displacement of the triangular sample was significantly lower, differing from that of the circular configuration by 7.9%. Different inner-hole geometric configurations have distinct effects on the substrate deformation behavior, among which the triangular configuration has the smallest influence on substrate adsorption-induced deformation. Therefore, designing suction cups with angular configurations can effectively improve the forming quality of spin-coated films.
关键词
旋涂吸盘 /
吸附变形 /
三维数字图像相关方法 /
应变 /
离面位移
Key words
spin coating suction cups /
adsorption deformation /
three-dimensional digital image correlation /
strain /
out-of-plane displacement
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基金
国家自然科学基金（12102302）; 天津市自然科学基金重点项目（24JCZDJC00280）; 天津市大学生创新训练计划（202510069062）
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